| WLI optical head unit | 						WLI optical head unit View field (H×V) - 5X lens: approx. 0.64x0.48mm / 10X lens: approx. 0.32×0.24mm / 25X lens: approx. 0.13×0.10mm 						Illumination Co-axial Light-Halogen 						Repeatability- 2s = 0.08µm 						Z-axis scanning range*2- 170µm | 						WLI optical head unit View field (H×V) - 5X lens: approx. 0.64x0.48mm / 10X lens: approx. 0.32×0.24mm / 25X lens: approx. 0.13×0.10mm 						Illumination Co-axial Light-Halogen 						Repeatability- 2s = 0.08µm 						Z-axis scanning range*2- 170µm | 						WLI optical head unit View field (H×V) - 5X lens: approx. 0.64x0.48mm / 10X lens: approx. 0.32×0.24mm / 25X lens: approx. 0.13×0.10mm 						Illumination Co-axial Light-Halogen 						Repeatability- 2s = 0.08µm 						Z-axis scanning range*2- 170µm | 					
											| Vision optical head unit | 												 Magnification change system : PPT1X-2X-6X 						 						Image detection method: B&W CCD camera 						 						 						Illumination: 						Co-axial Light- White LED 						Transmitted Light- White LED 						Programmable ring light: White LED 						 						Measuring accuracy: 						E1X, E1Y(0.8+2L/1000)μm 						E1Z(1.5+2L/1000)μm 						E2XY(1.4+3L/1000)μm 						EU,MPE (ISO10360-7:2011) 2.5+4L/1000, 2.5+4.5L/1000 						PF2D,MPE (ISO10360-7:2011) 1.7µm 						 | 												 Magnification change system : PPT1X-2X-6X 						 						Image detection method: B&W CCD camera 						 						 						Illumination: 						Co-axial Light- White LED 						Transmitted Light- White LED 						Programmable ring light: White LED 						 						Measuring accuracy: 						E1X, E1Y(0.8+2L/1000)μm 						E1Z(1.5+2L/1000)μm 						E2XY(1.4+3L/1000)μm 						EU,MPE (ISO10360-7:2011) 2.5+4L/1000, 2.5+4.5L/1000 						PF2D,MPE (ISO10360-7:2011) 1.7µm 						 | 												 Magnification change system : PPT1X-2X-6X 						 						Image detection method: B&W CCD camera 						 						 						Illumination: 						Co-axial Light- White LED 						Transmitted Light- White LED 						Programmable ring light: White LED 						 						Measuring accuracy: 						E1X, E1Y(0.8+2L/1000)μm 						E1Z(1.5+2L/1000)μm 						E2XY(1.4+3L/1000)μm 						EU,MPE (ISO10360-7:2011) 2.5+4L/1000, 2.5+4.5L/1000 						PF2D,MPE (ISO10360-7:2011) 1.7µm 						 |