| Model No and Type | QV ACCEL 808PRO | QV ACCEL 1010PRO | QV ACCEL1212PRO | QV ACCEL 1517PRO |
| Image | - | - |  | - |
| Range X-Axis | 0-32in 0-800mm | 0-40in 0-1000mm | 0-50in 0-1250mm | 0-60in 0-1500mm |
| Range Y-Axis | 0-800in 0-32mm | 0-1000in 0-40mm | 0-1250in 0-50mm | 0-1750in 0-70mm |
| Range Z-Axis | 0-6in 0-150mm | 0-6in 0-150mm | 0-4in 0-100mm | 0-4in 0-100mm |
| Resolution | 0.1µm | 0.1µm | 0.1µm | 0.1µm |
| High-sensitivity CCD camera | BW | BW | BW | BW |
| Accuracy (20°C 1.0°C) | E1xy-(1.5+3L/1000)µm E1z-(3.0+4L1000)µm E2xy-(2.5+4L/1000)µm | E1xy-(1.5+3L/1000)µm E1z-(3.0+4L1000)µm E2xy-(2.5+4L/1000)µm | E1xy-(2.2+3L/1000)µm E1z-(4.0+5L1000)µm E2xy-(3.5+4L/1000)µm | E1xy-(2.2+3L/1000)µm E1z-(4.0+5L1000)µm E2xy-(3.5+4L/1000)µm |
| Max.Drive Speed | X/Y400 150mm/s | X/Y400 150mm/s | X/Y300 150mm/s | X/Y300 150mm/s |
| Illumination | Surface-LED,white Contour-LED,White PRL-LED,white (4 divisions) | Surface-LED,white Contour-LED,White PRL-LED,white (4 divisions) | Surface-LED,white Contour-LED,White PRL-LED,white (4 divisions) | Surface-LED,white Contour-LED,White PRL-LED,white (4 divisions) |
| Maganification change system | Programmable power (1x ,2x ,6x) turret | Programmable power (1x ,2x ,6x) turret | Programmable power (1x ,2x ,6x) turret | Programmable power (1x ,2x ,6x) turret |
| Stage glass size | 34.8x37.7in 883x958mm | 46.7x46.7in 1186x1186mm | 56.7x56.7in 1440x1440mm | 67.5x77.5in 1714x1968mm |
| Dimension | 58x67.5x62in 1475x1716x1578mm | 75.3x82x63in 1912x2086x1603mm | 85.3x92x61in 2166x2340x1554mm | 96x113x61in 2440x2868x1554mm |
| Mass | 5654lbs 2570kg | 6490lbs 2950kg | 7920lbs 3600kg | 9900lbs 4500kg |