The standard of Table-top SEM,
SNE-3000MS
Energy Dispersive X-Ray Spectrometer (EDS)
Model: XFlash® 630H
Manufacturers: Bruker
Detector: LN2-free high-speed SDD Detector
Chip Size: 30 mm2
Element Detector Range: Boron(5) ~ Americium(95)
Spectrum Resolution: Less than 129eV (Standard: MnKα)
Ion Suptter Coater
Model: MCM-100
Manufacturer: SEC – Korea
Tabletop SEM
Model: SNE-4500 Plus
Manufacturers: SEC – Korea
Scanning Electron Microscopy (SEM) is used for various ingredient analysis and surface structure analysis through several detectors after focusing and detecting secondary electron emitted from sample by shooting electron beam on the sample in the chamber. SEM is the foundation technique of MEMS(Microelectromechanical systems) industry and an equipment for analysis and measurement of ultrafine nano structure having resolution of 1nm.