Order Number | MF-UA1010D 176-871-10 | MF-UA2010D 176-872-10 | MF-UA2017D 176-873-10 | MF-UA3017D 176-874-10 |
XY stage travel range | 4x4in 100x100mm | 8x4in 200x100mm | 8x6.7in 200x170mm | 12x6.7in 300x170mm |
Z-axis travel range | 0-6in 0-150mm | 0-6in 0-150mm | 0-8.7in 0-220mm | 0-8.7in 0-220mm |
Focusing method | Manual focusing coarse focusing:10mm/rev fine focusing:0.1mm/rev | Manual focusing coarse focusing:10mm/rev fine focusing:0.1mm/rev | Manual focusing coarse focusing:10mm/rev fine focusing:0.1mm/rev | Manual focusing coarse focusing:10mm/rev fine focusing:0.1mm/rev |
Measurement method | Linear encoder 2-axis model:X/Y-axis 3-axis model:X/Y/Z-axis | Linear encoder 2-axis model:X/Y-axis 3-axis model:X/Y/Z-axis | Linear encoder 2-axis model:X/Y-axis 3-axis model:X/Y/Z-axis | Linear encoder 2-axis model:X/Y-axis 3-axis model:X/Y/Z-axis |
Resolution (switchable) | .0001"/.00005"/.00001" 0.001mm/0.0005mm/0.0001mm | .0001"/.00005"/.00001" 0.001mm/0.0005mm/0.0001mm | .0001"/.00005"/.00001" 0.001mm/0.0005mm/0.0001mm | .0001"/.00005"/.00001" 0.001mm/0.0005mm/0.0001mm |
Measuring accuracy(at 20 °C) | XY-axis(2.2+0.02L)µm L=Measuring length(mm) when not loaded JIS B 7153 | XY-axis(2.2+0.02L)µm L=Measuring length(mm) when not loaded JIS B 7153 | XY-axis(2.2+0.02L)µm L=Measuring length(mm) when not loaded JIS B 7153 | XY-axis(2.2+0.02L)µm L=Measuring length(mm) when not loaded JIS B 7153 |
Indication accuracy(20 °C) | Z-axis:(5+0.04L)µm L=Measuring length(mm) | Z-axis:(5+0.04L)µm L=Measuring length(mm) | Z-axis:(5+0.04L)µm L=Measuring length(mm) | Z-axis:(5+0.04L)µm L=Measuring length(mm) |
Floating function | X and Y axis with Quick-release mechanism | X and Y axis with Quick-release mechanism | X and Y axis with Quick-release mechanism | X and Y axis with Quick-release mechanism |
XY stage top size | 11x11in 280x280mm | 14x11in 350x280mm | 16x13.6in 410x342mm | 20x13.6in 510x342mm |
Effective glass size | 7.1x7.1in 180x180mm | 10x6in 250x150mm | 10.6x9.6in 270x240mm | 14.6x9.6in 370x240mm |
Swiveling function | - | - | ±5 ̊(left) | ±5 ̊(left) |
Max. stage loading | 22lbs/10kg | 44lbs/20kg | 44lbs/20kg | 44lbs/20kg |
Max.workpiece height | 6in/ 150mm | 6in/ 150mm | 8.7in/ 220mm | 8.7in/ 220mm |