*1: Accuracy when measured at the center of the video screen
and in the middle of measuring stroke on a plane using the 5X objective and 1X tube lens
*2: Specified only for factory shipping inspection.
*3: Accuracy assurance environments in the case where no temperature compensation is performed.
Those in the case where temperature compensation is performed are as follows.
- Accuracy-assured temperature range: 20±2˚C
- Temperature variation: 0.5˚C/H
- Temperature gradient: 1˚C/m
*4: Thermal expansion coefficient: (0±0.02)X10-6/K
*5: Accuracy 1.3+3L/1000 for 20 ± 2°C, Accuracy 1.3+3.50L/1000 from 18 to 23°C
*6: An air source is required to maintain the original air pressure between 0.5 and 0.9MPa.
*7: Indicates the flow rate under normal conditions.
Tracking Auto Focus (TAF)The TAF feature focuses continuously, adjusting to changes in the height of the object being measured. Automatic tracking of surface waves and warpage (in the Z axis height direction) improves measurement throughput. The feature also cuts out the hassle of focusing during manual measurement, reducing the work burden for measuring system operators.
Note: Continuous measurement of displacement is not performed.
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Model No. | Quick Vision Ultra 404 PRO Quick Vision Ultra 404 PRO (ISO10360-7:2011) Quick Vision Ultra 404 PRO (w/TAF) Quick Vision Ultra 404 PRO(w/TAF) (ISO10360-7:2011) | Range | X AXIS-16in-400mm Y-AXIS-16 in-400mm Z-AXIS-8in-200mm | Magnification change system | Programmable power turret (selectable from among magnifications of 1X, 2X, and 6X) | Resolution/Scale unit | 0.01µm/Linear Encoder*4 | Resolution of -scale when using TAF | 0.25µm | High-sensitivity CCS camera | Black & White | Illumination (PRL:Programmable Ring Light) | Surface Halogen Contour Halogen PRL Halogen | Accuracy*1 (20°C±2°C) | E1XY-(0.25+L/1000)µm E1Z-(50mm stroke)*2-(1.0+2L/1000)µm E1Z-(Full stroke)-(1.5+2L/1000)µm E2XYplane-(0.5+2L/1000)µm EU,MPE(ISO10360-7:2011)-1.3+3L/1000, 1.3+3.5L/1000*5 PF2D,MPE(ISO10360-7:2011)-1.0µm | Accuracy assurance environments*3 | Temperature range: 20±0.2°C Temperature variation 0.5°C/1H Temperature gradient 1°C/m | Repeatability | Repeatability within the visual field: 3s=0.2µm Repeatability of auto-focus s=0.4µm | Stage glass size | 19.4 x21.7 | Max workpiece load | 2025kg 4464lbs | Dimensions (WxDxH) | 46inx68inx75.2in (1172x1735x1910mm) | Mass | 2025kg 4464lbs | Used air pressure | 0.4MPa*5 | Supplied air flow rate | 150L/min*6 | |