WLI optical head unit | WLI optical head unit View field (H×V) - 5X lens: approx. 0.64x0.48mm / 10X lens: approx. 0.32×0.24mm / 25X lens: approx. 0.13×0.10mm Illumination Co-axial Light-Halogen Repeatability- 2s = 0.08µm Z-axis scanning range*2- 170µm | WLI optical head unit View field (H×V) - 5X lens: approx. 0.64x0.48mm / 10X lens: approx. 0.32×0.24mm / 25X lens: approx. 0.13×0.10mm Illumination Co-axial Light-Halogen Repeatability- 2s = 0.08µm Z-axis scanning range*2- 170µm | WLI optical head unit View field (H×V) - 5X lens: approx. 0.64x0.48mm / 10X lens: approx. 0.32×0.24mm / 25X lens: approx. 0.13×0.10mm Illumination Co-axial Light-Halogen Repeatability- 2s = 0.08µm Z-axis scanning range*2- 170µm |
Vision optical head unit | Magnification change system : PPT1X-2X-6X Image detection method: B&W CCD camera Illumination: Co-axial Light- White LED Transmitted Light- White LED Programmable ring light: White LED Measuring accuracy: E1X, E1Y(0.8+2L/1000)μm E1Z(1.5+2L/1000)μm E2XY(1.4+3L/1000)μm EU,MPE (ISO10360-7:2011) 2.5+4L/1000, 2.5+4.5L/1000 PF2D,MPE (ISO10360-7:2011) 1.7µm | Magnification change system : PPT1X-2X-6X Image detection method: B&W CCD camera Illumination: Co-axial Light- White LED Transmitted Light- White LED Programmable ring light: White LED Measuring accuracy: E1X, E1Y(0.8+2L/1000)μm E1Z(1.5+2L/1000)μm E2XY(1.4+3L/1000)μm EU,MPE (ISO10360-7:2011) 2.5+4L/1000, 2.5+4.5L/1000 PF2D,MPE (ISO10360-7:2011) 1.7µm | Magnification change system : PPT1X-2X-6X Image detection method: B&W CCD camera Illumination: Co-axial Light- White LED Transmitted Light- White LED Programmable ring light: White LED Measuring accuracy: E1X, E1Y(0.8+2L/1000)μm E1Z(1.5+2L/1000)μm E2XY(1.4+3L/1000)μm EU,MPE (ISO10360-7:2011) 2.5+4L/1000, 2.5+4.5L/1000 PF2D,MPE (ISO10360-7:2011) 1.7µm |